Energy Efficient Design of Cleanroom Recirculation Air Systems

Greg Owen, Jacobs

Air recirculation is the largest, single user of energy in a cleanroom. This presentation provides information that will allow a cleanroom A/E to design a recirculation system that will provide a sustainable, energy efficient facility that meets the space contamination criteria, maintains the required temperature and humidity conditions and is a quite research environment. Performance data on multiple, operating facilities will be presented to validate the design approaches provided in the presentation

Learning Objectives

  • Understand and determine the energy performance metrics used to evaluate cleanroom energy performance.
  • Understand the relationship of Air flow, static pressure and component efficiency in the design of cleanroom recirculation systems
  • Understand the nuances of the relationship between fan speed, sound power and system energy performance.
  • Understand the methods and approaches used during commissioning to validate Cleanroom Recirculation Air System energy performance.


Greg Owen, PE is the Cleanroom Design Principal for Jacobs, a global provider of engineering and construction services. He has over 35 years' experience in the design and construction of contamination control facilities for semiconductor, solar, aerospace, pharmaceutical, and University. As a Mechanical Engineer with multi discipline experience he has been involved in the design of over 2 million square feet of cleanrooms.


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